PCT/US2025/034151
WO - 26.12.2025
RESIDUE REMOVAL AFTER ETCH PROCESSES USING A BORON-CONTAINING ETCHANT
Publication Number
WO/2025/264794
Applicant
APPLIED MATERIALS, INC.
Inventor
WANG, Baiwei
Priority Data
18/750,084, 21.06.2024, US